国家/地区 Usa（2）
关键词 ATOMIC LAYER DEPOSITION（2）
出版物
出版时间
机构 UNIV TEXAS D.（2）
作者 KIM MJ（2）

Atomic Layer Deposition of Dielectrics on Graphene Using Reversibly Physisorbed Ozone

ACS NANO

JANDHYALA S, MORDI G, LEE B, LEE G, FLORESCA C, CHA PR, AHN J, WALLACE RM, CHABAL YJ, KIM MJ, COLOMBO L, CHO K, KIM J

Characteristics of high-k Al2O3 dielectric using ozone-based atomic layer deposition for dual-gated graphene devices

APPLIED PHYSICS LETTERS

LEE B, MORDI G, KIM MJ, CHABAL YJ, VOGEL EM, WALLACE RM, CHO KJ, COLOMBO L, KIM J