国家/地区 Taiwan（2）
关键词 RADIOFREQUENCY RF MAGNETRON SPUTTERING（2）
出版物
出版时间 2018（2）
机构
作者 LIN JF（2）

Effects of deposition method and conditions for IGZO film and thermal annealing on composite film quality, surface roughness, microstructural defects, and electrical properties of Ti/IGZO/graphene/polyimide specimens

JOURNAL OF ALLOYS COMPOUNDS

CHANG CS, LI TC, TSAI YC, WU GH, LIN JF

Effects of thin titanium and graphene depositions and annealing temperature on electrical, optical, and mechanical properties of IGZO/Ti/graphene/PI specimen

CERAMICS INTERNATIONAL

LI TC, HAN CF, HSIEH KC, LIN JF