国家/地区
关键词 ION IMPLANTATION(3)
出版物
出版时间 2018(3)
机构
作者

NUCLEAR INSTRUMENTS METHODS IN PHYSICS RESEARCH SECTION BBEAM INTERACTIONS WITH MATERIALS ATOMS

JAGIELSKI J, KOSINSKA A, OSTASZEWSKA U, ROMANIEC M, KURPASKA L, JOZWIK I

SEMICONDUCTOR SCIENCE TECHNOLOGY

HU XD, ZHANG M, XUE ZY, DONG LX, WANG GF, WANG YQ, CHU PK, WANG X, DI ZF

ACS NANO

TRIPATHI M, MARKEVICH A, BOTTGER R, FACSKO S, BESLEY E, KOTAKOSKI J, SUSI T