国家/地区 | |
关键词 | ION IMPLANTATION(3) |
出版物 | |
出版时间 | 2018(3) |
机构 | |
作者 |
NUCLEAR INSTRUMENTS METHODS IN PHYSICS RESEARCH SECTION BBEAM INTERACTIONS WITH MATERIALS ATOMS
JAGIELSKI J, KOSINSKA A, OSTASZEWSKA U, ROMANIEC M, KURPASKA L, JOZWIK I
SEMICONDUCTOR SCIENCE TECHNOLOGY
HU XD, ZHANG M, XUE ZY, DONG LX, WANG GF, WANG YQ, CHU PK, WANG X, DI ZF
ACS NANO
TRIPATHI M, MARKEVICH A, BOTTGER R, FACSKO S, BESLEY E, KOTAKOSKI J, SUSI T