国家/地区
关键词 MEMS(4)
出版物
出版时间 2023(4)
机构
作者

MICROELECTRONIC ENGINEERING

TANG CG, WANG YQ, LI YN, ZENG SM, KONG LB, LI LA, SUN JY, ZHU MQ, DENG T

ACS APPLIED MATERIALS INTERFACES

SMITH K, RETALLICK A, MELENDREZ D, VIJAYARAGHAVAN A, HEIL M

MICROMACHINES

XU J, WOOD GS, MASTROPAOLO E, LOMAX P, NEWTON M, CHEUNG R

INTERNATIONAL JOURNAL OF NONLINEAR MECHANICS

NUNEZ D, GALANVIOQUE J, MURCIA L