国家/地区 Netherlands（2）
关键词 MEMS（4）
出版物 ACS APPLIED MATERIALS INTERFACES（4）
出版时间 2021（2）
机构
作者

Sensitive Transfer-Free Wafer-Scale Graphene Microphones

ACS APPLIED MATERIALS INTERFACES

PEZONE R, BAGLIONI G, SARRO PM, STEENEKEN PG, VOLLEBREGT S

Modeling Graphene-Polymer Heterostructure MEMS Membranes with the Foppl-von Karman Equations

ACS APPLIED MATERIALS INTERFACES

SMITH K, RETALLICK A, MELENDREZ D, VIJAYARAGHAVAN A, HEIL M

Realization of a Graphene/PMMA Acoustic Capacitive Sensor Released by Silicon Dioxide Sacrificial Layer

ACS APPLIED MATERIALS INTERFACES

XU J, WOOD GS, MASTROPAOLO E, NEWTON MJ, CHEUNG R

Biomimetic Soft Polymer Microstructures and Piezoresistive Graphene MEMS Sensors Using Sacrificial Metal 3D Printing

ACS APPLIED MATERIALS INTERFACES

KAMAT AM, PEI YT, JAYAWARDHANA B, KOTTAPALLI AGP