国家/地区 | China(2) |
关键词 |
MEMS(3)![]() |
出版物 |
JOURNAL OF MICROMECHANICS MICROENGINEERING(3)![]() |
出版时间 | |
机构 | |
作者 |
JOURNAL OF MICROMECHANICS MICROENGINEERING
LI JH, TOAN NV, WANG ZQ, ONO T
JOURNAL OF MICROMECHANICS MICROENGINEERING
LI P, CUI TH
JOURNAL OF MICROMECHANICS MICROENGINEERING
HAN BQ, LIU TH, WANG HR, SHI LJ, CHEN JL, SUN JH, WANG JH, TIAN XQ