国家/地区 China（2）
关键词 MEMS（3）
出版物 SENSORS ACTUATORS APHYSICAL（3）
出版时间
机构
作者

Dosed carbon precipitation and graphene layer number control on nickel micro-electromechanical systems surfaces

SENSORS ACTUATORS APHYSICAL

GKOUZOU A, JANSSEN GCAM, VAN SPENGEN WM

Long lifecycle MEMS double-clamped beam based on low stress graphene compound film

SENSORS ACTUATORS APHYSICAL

ZHANG T, BAO JF, ZENG RZ, YANG Y, BAO LL, BAO FH, ZHANG Y, QIN F

Adhesion energy of few layer graphene characterized by atomic force microscope

SENSORS ACTUATORS APHYSICAL

LI P, YOU Z, CUIA TH