国家/地区 China（2）
关键词 OXYGEN PLASMA（2）
出版物
出版时间 2018（2）
机构
作者

Double-sided masking and stress-release etching for the fabrication of high-aspect-ratio graphene micro-cantilever

JOURNAL OF MICROMECHANICS MICROENGINEERING

LI SS, ZENG MX, HUANG YF, ZHAN RZ, CHEN J, XU NS, SHE JC, DENG SZ

Effect of low temperature oxygen plasma treatment on microstructure and adhesion force of graphene

APPLIED SURFACE SCIENCE

ZHU J, DENG HJ, XUE W, WANG Q