国家/地区 | China(3) |
关键词 | PECVD(3) |
出版物 | |
出版时间 | |
机构 | JILIN UNIV(2) |
作者 | QI JL(3) |
MATERIALS RESEARCH EXPRESS
QI JL, ZHANG F, ZHANG LX, CAO J, FENG JC
CHINESE SCIENCE BULLETIN
QI JL, ZHANG LX, CAO J, ZHENG WT, WANG X, FENG JC
APPLIED SURFACE SCIENCE
QI JL, ZHENG WT, ZHENG XH, WANG X, TIAN HW