国家/地区 | China(3) |
关键词 | CHEMICAL VAPOR DEPO.(2) |
出版物 | |
出版时间 | 2023(3) |
机构 | |
作者 | DAI SX(3) |
MICROMACHINES
XIAO BB, YIN MQ, LI WF, LIANG LY, DAI SX, ZHANG XH, WANG W, LIU ZP
MATERIALS
GUO ZC, YE ZY, YIN MQ, DAI SX, ZHANG XH, WANG W, LIU ZP
RESULTS IN PHYSICS
WANG XM, WANG CQ, DAI SX