国家/地区 China（2）
关键词
出版物 JOURNAL OF MICROMECHANICS MICROENGINEERING（2）
出版时间 2018（2）
机构
作者

A humidity sensor based on AlN Lamb wave resonator coated with graphene oxide of different concentrations

JOURNAL OF MICROMECHANICS MICROENGINEERING

PANG JT, LE XH, XU Z, GAO C, XIE J

Double-sided masking and stress-release etching for the fabrication of high-aspect-ratio graphene micro-cantilever

JOURNAL OF MICROMECHANICS MICROENGINEERING

LI SS, ZENG MX, HUANG YF, ZHAN RZ, CHEN J, XU NS, SHE JC, DENG SZ