国家/地区 India（2）
关键词 PECVD（2）
出版物
出版时间
机构
作者 GUPTA R（2）

Numerical Simulation and Parametric Study of Carbon Deposition During Graphene Growth in PECVD System

IEEE TRANSACTIONS ON NANOTECHNOLOGY

KUMAR M, KHANNA S, GUPTA N, GUPTA R, SHARMA SC

Investigations on the effect of process parameters on the growth of vertically oriented graphene sheet in plasma-enhanced chemical vapour deposition system

CONTRIBUTIONS TO PLASMA PHYSICS

GUPTA N, GUPTA R, SHARMA SC