国家/地区 | Korea(4) |
关键词 | PECVD(4) |
出版物 | |
出版时间 | 2019(4) |
机构 | SUNGKYUNKWAN.(2) |
作者 |
ELECTRONIC MATERIALS LETTERS
SEO HJ, GIL YE, HWANG KH, ANANTH A, BOO JH
JOURNAL OF INDUSTRIAL ENGINEERING CHEMISTRY
GHOSH S, POLAKI SR, SAHOO G, JIN EM, KARNRUDDIN M, CHO JS, JEONG SM
APPLIED SURFACE SCIENCE
KIM HU, KIM M, JIN Y, HYEON Y, KIM KS, AN BS, YANG CW, KANADE V, MOONN JY, YEOM GY, WHANG D, LEE JH, KIM T
ACS APPLIED MATERIALS INTERFACES
MA YF, JIANG W, HAN JM, TONG ZM, WANG M, SUHR J, CHEN XY, XIAO LT, JIA ST, CHAE H