国家/地区 Netherlands（5）
关键词 MEMS（5）
出版物 ACS APPLIED MATERIA.（2）
出版时间 2021（2）
机构 DELFT UNIV T.（2）
作者 STEENEKEN PG（2）

Dosed carbon precipitation and graphene layer number control on nickel micro-electromechanical systems surfaces

SENSORS ACTUATORS APHYSICAL

GKOUZOU A, JANSSEN GCAM, VAN SPENGEN WM

Graphene Squeeze-Film Pressure Sensors

NANO LETTERS

DOLLEMAN RJ, DAVIDOVIKJ D, CARTAMILBUENO SJ, VAN DER ZANT HSJ, STEENEKEN PG

Sensitive Transfer-Free Wafer-Scale Graphene Microphones

ACS APPLIED MATERIALS INTERFACES

PEZONE R, BAGLIONI G, SARRO PM, STEENEKEN PG, VOLLEBREGT S

Tunable coupling of two mechanical resonators by a graphene membrane

2D MATERIALS

VERBIEST GJ, GOLDSCHE M, SONNTAG J, KHODKOV T, VON DEN DRIESCH N, BUCA D, STAMPFER C

Biomimetic Soft Polymer Microstructures and Piezoresistive Graphene MEMS Sensors Using Sacrificial Metal 3D Printing

ACS APPLIED MATERIALS INTERFACES

KAMAT AM, PEI YT, JAYAWARDHANA B, KOTTAPALLI AGP