国家/地区 Usa（2）
关键词
出版物
出版时间 2013（2）
机构 NORTHWESTERN UNIV（2）
作者 MARKS TJ（2）

Optimization of graphene dry etching conditions via combined microscopic and spectroscopic analysis

APPLIED PHYSICS LETTERS

PRADO MC, JARIWALA D, MARKS TJ, HERSAM MC

Quantitatively Enhanced Reliability and Uniformity of High-kappa Dielectrics on Graphene Enabled by Self-Assembled Seeding Layers

NANO LETTERS

SANGWAN VK, JARIWALA D, FILIPPONE SA, KARMEL HJ, JOHNS JE, ALABOSON JMP, MARKS TJ, LAUHON LJ, HERSAM MC