国家/地区 Usa(3)
关键词
出版物 JOURNAL OF VACUUM SCIENCE TECHNOLOGY A(3)
出版时间 2013(3)
机构
作者

JOURNAL OF VACUUM SCIENCE TECHNOLOGY A

NARAYANAN B, WEEKS SL, JARIWALA BN, MACCO B, WEBER JW, RATHI SJ, VAN DE SANDEN MCM, SUTTER P, AGARWAL S, CIOBANU CV

JOURNAL OF VACUUM SCIENCE TECHNOLOGY A

MATSUBAYASHI A, ABEL J, SINHA DP, LEE JU, LABELLA VP