APPLIED PHYSICS EXPRESS

NISHIGUCHI K, YOSHIZUMI D, SEKINE Y, FURUKAWA K, FUJIWARA A, NAGASE M

MICROMACHINES

TAKAMURA M, OKAMOTO H, FURUKAWA K, YAMAGUCHI H, HIBINO H

ACS SENSORS

FURUKAWA K, UENO Y, TAKAMURA M, HIBINO H

APPLIED PHYSICS LETTERS

HATTORI M, IKENOUE H, NAKAMURA D, FURUKAWA K, TAKAMURA M, HIBINO H, OKADA T