国家/地区 Usa（2）
关键词
出版物 NATURE COMMUNICATIO.（2）
出版时间 2018（2）
机构 UNIV ILLINOIS（2）
作者 RYU HJ（2）

Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures (vol 9, 3988, 2018)

NATURE COMMUNICATIONS

SON J, KWON J, KIM S, LV YC, YU JY, LEE JY, RYU HJ, WATANABE K, TANIGUCHI T, GARRIDOMENACHO R, MASON N, ERTEKIN E, HUANG PY, LEE GH, VAN DER ZANDE AM

Atomically precise graphene etch stops for three dimensional integrated systems from two dimensional material heterostructures

NATURE COMMUNICATIONS

SON J, KWON J, KIM S, LV YC, YU J, LEE JY, RYU HJ, WATANABE K, TANIGUCHI T, GARRIDOMENACHO R, MASON N, ERTEKIN E, HUANG PY, LEE GH, VAN DER ZANDE AM