国家/地区
关键词 MEMS（2）
出版物 ACS APPLIED MATERIALS INTERFACES（2）
出版时间 2021（2）
机构
作者

Realization of a Graphene/PMMA Acoustic Capacitive Sensor Released by Silicon Dioxide Sacrificial Layer

ACS APPLIED MATERIALS INTERFACES

XU J, WOOD GS, MASTROPAOLO E, NEWTON MJ, CHEUNG R

Biomimetic Soft Polymer Microstructures and Piezoresistive Graphene MEMS Sensors Using Sacrificial Metal 3D Printing

ACS APPLIED MATERIALS INTERFACES

KAMAT AM, PEI YT, JAYAWARDHANA B, KOTTAPALLI AGP