国家/地区 | |
关键词 | MEMS(5) |
出版物 | MICROMACHINES(2) |
出版时间 | 2022(5) |
机构 | |
作者 |
ACS APPLIED MATERIALS INTERFACES
PEZONE R, BAGLIONI G, SARRO PM, STEENEKEN PG, VOLLEBREGT S
MICROMACHINES
IRANI FS, SHAFAGHI AH, TASDELEN MC, DELIPINAR T, KAYA CE, YAPICI GG, YAPICI MK
MICROMACHINES
CHO JH, CAYLL D, BEHERA D, CULLINAN M
SENSORS
LIU DS, WEI SS, WANG DJ
ADVANCED INTELLIGENT SYSTEMS
LIU YC, LIANG XP, LI HN, DENG HT, ZHANG XR, WEN DL, YUAN MY, HEIDARI HD, GHANNAM R, ZHANG XS