国家/地区
关键词 MEMS(5)
出版物 MICROMACHINES(2)
出版时间 2022(5)
机构
作者

ACS APPLIED MATERIALS INTERFACES

PEZONE R, BAGLIONI G, SARRO PM, STEENEKEN PG, VOLLEBREGT S

MICROMACHINES

IRANI FS, SHAFAGHI AH, TASDELEN MC, DELIPINAR T, KAYA CE, YAPICI GG, YAPICI MK

ADVANCED INTELLIGENT SYSTEMS

LIU YC, LIANG XP, LI HN, DENG HT, ZHANG XR, WEN DL, YUAN MY, HEIDARI HD, GHANNAM R, ZHANG XS