国家/地区 China(4)
关键词 DENSITY FUNCTIONAL THEORY(5)
出版物 MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING(5)
出版时间 2022(4)
机构
作者

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

LI CH, YANG XN, GUO YN

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

RUI CK, SHAO C, LIU JX, CHEN AQ, ZHU KG, SHAO QY

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

JIANG LL, CHEN ZY, CUI Q, XU S, HOU XG, TANG FL