国家/地区 美国（3）
IPC部 B（3） C（2）
IPC大类 B82（3） C23（2）
IPC小类 B82Y（3） C23C（2）
IPC B82Y099/00（2） C23C016/00（2） C23C016/40（2）
发明人 GASKILL D K（3）
公开年 2013（3）
申请年
专利权人 US SEC OF NA.（3）

Functionalizing epitaxial graphene sample surface for atomic layer deposition of dielectric in reactor, by subjecting sample to ex situ functionalization step, and subjecting sample having hydroxide terminated surface to in situ treatment.

GARCES N, WHEELER V D, GASKILL D K, EDDY C R, JERNIGAN G G

Broadband absorptive neutral density optical filter used in optical system for attenuation of e.g. terahertz radiation has graphene layers whose number depends on desired optical absorption or transmission of filter.

CURRIE M, GASKILL D K

Preparing surface of epitaxial graphene sample for atomic layer deposition (ALD) of dielectric in ALD reactor, comprises pre-treating (e.g. immersing in e.g. hydrofluoric acid) sample ex situ outside reactor and then in situ inside reactor.

GARCES N, WHEELER V D, GASKILL D K, EDDY C R, JERNIGAN G G