国家/地区 中国（2）
IPC部 C（2）
IPC大类 C04（2）
IPC小类 C04B（2）
IPC C23C016/26（2）
发明人
公开年
申请年 2012（2）
专利权人

Graphene load porous ceramic electrically conductive material preparation method, involves reducing porous ceramic material surface with layer of metal, and obtaining conductive material by chemical vapor deposition process in furnace.

BI H, HUANG F, ZHOU M

Structural graphene production on silicon carbide substrate for manufacturing microelectronic devices includes depositing layer of silicon dioxide as mask, coating mask surface, and exposing to form structured pattern.

DENG P, GUO H, LEI T, ZHANG Y, ZHANG K, ZHANG F