• 文献标题:   Complementary metal-SU8-graphene method for making integrated graphene nanocircuits
  • 文献类型:   Article
  • 作  者:   ALMUMEN H, LI W
  • 作者关键词:   graphene, polymer film, elemental semiconductor, thin film, integrated circuit design, electron beam lithography, nanopatterning, semiconductor doping, invertor, field effect transistor, graphene device, complementary metalsu8graphene method, integrated graphene nanocircuit, air stability, temperature stability, electron beam lithography, microscale meshe, nanoscale meshe, su8 thin film, ptype graphene, doping source, encapsulating layer, ntype graphene, voltage inverter, field effect transistor, single graphene sheet, electronic characteristic, thermal characteristic, c
  • 出版物名称:   MICRO NANO LETTERS
  • ISSN:   1750-0443
  • 通讯作者地址:   Univ Babylon
  • 被引频次:   0
  • DOI:   10.1049/mnl.2017.0508
  • 出版年:   2018

▎ 摘  要

This work reports a complementary metal-SU8-graphene (MSG) method for constructing integrated graphene nanocircuits with excellent air and temperature stability. In this approach, electron beam (e-beam) lithography was first used to selectively pattern micro/nanoscale meshes on pristine graphene to form p-type regions. Then SU-8 thin films were spun and e-beam patterned to convert the target region of p-type graphene into n-type. The SU-8 was utilised as a doping source and an encapsulating layer for n-type graphene. To demonstrate the proposed MSG method, a graphene-based voltage inverter is constructed by complementary doping p- and n-type field effect transistors on a single graphene sheet. The electronic and thermal characteristics of the fabricated device were also studied.