• 文献标题:   Applying strain into graphene by SU-8 resist shrinkage
  • 文献类型:   Article
  • 作  者:   TAKAMURA M, HIBINO H, YAMAMOTO H
  • 作者关键词:   graphene, strain, raman spectroscopy
  • 出版物名称:   JOURNAL OF PHYSICS DAPPLIED PHYSICS
  • ISSN:   0022-3727 EI 1361-6463
  • 通讯作者地址:   NTT Corp
  • 被引频次:   1
  • DOI:   10.1088/0022-3727/49/28/285303
  • 出版年:   2016

▎ 摘  要

We investigated the use of the shrinkage of SU-8 resist caused by thermal annealing to apply strain into graphene grown by the chemical-vapor-deposition (CVD) method. We demonstrate that the shrinkage of resist deposited on top of graphene on a substrate induces a local tensile strain within a distance of 1-2 mu m from the edge of the resist. The thermal shrinkage of SU-8 will allow us to design the local strain in graphene on substrates. We also show that the shrinkage induces a large tensile strain in graphene suspended between two bars of SU-8. We expect that a much larger strain can be induced by suppressing defects in CVD-grown graphene.