• 文献标题:   Chemical vapor deposited graphene: From synthesis to applications
  • 文献类型:   Review
  • 作  者:   KATARIA S, WAGNER S, RUHKOPF J, GAHOI A, PANDEY H, BORNEMANN R, VAZIRI S, SMITH AD, OSTLING M, LEMME MC
  • 作者关键词:   chemical vapor deposition, graphene, graphene transfer, hot electron transistor, pressure sensor
  • 出版物名称:   PHYSICA STATUS SOLIDI AAPPLICATIONS MATERIALS SCIENCE
  • ISSN:   1862-6300 EI 1862-6319
  • 通讯作者地址:   Univ Siegen
  • 被引频次:   55
  • DOI:   10.1002/pssa.201400049
  • 出版年:   2014

▎ 摘  要

Graphene is a material with enormous potential for numerous applications. Therefore, significant efforts are dedicated to large-scale graphene production using a chemical vapor deposition (CVD) technique. In addition, research is directed at developing methods to incorporate graphene in established production technologies and process flows. In this paper, we present a brief review of available CVD methods for graphene synthesis. We also discuss scalable methods to transfer graphene onto desired substrates. Finally, we discuss potential applications that would benefit from a fully scaled, semiconductor technology compatible production process.