• 文献标题:   Growth of graphene from solid amorphous carbon: A new geometry for control carbon diffusion barrier
  • 文献类型:   Article
  • 作  者:   ZHANG AF, WANG L, WANG ZY, CHEN RD, LI XP, WANG YB, WANG AY
  • 作者关键词:   amorphous carbon, annealing, graphene, carbon material, diffusion
  • 出版物名称:   VACUUM
  • ISSN:   0042-207X EI 1879-2715
  • 通讯作者地址:  
  • 被引频次:   0
  • DOI:   10.1016/j.vacuum.2023.112106 EA APR 2023
  • 出版年:   2023

▎ 摘  要

As an alternative strategy to fabricate high-quality graphene over a large area, metal catalysis has been attempted at elevated temperatures with solid carbon sources. However, graphene was generally fabricated on the surface of metal catalysis layer using amorphous carbon as solid carbon sources. In this study, a thin Al2O3 barrier (1 nm) deposited on an amorphous-C/Ni bilayer stack is demonstrated to enable direct growth of few layer graphene (FLG) identified as 3-4 layers on substrate surface at 700 degrees C and 800 degrees C. Moreover, the obtained graphene shows a good transmittance (93%) under the light source of 550 nm. The findings provide a way to directly synthesis FLG on the required substrate at low temperature, which may dramatically broaden the ap-plications range of graphene.