▎ 摘 要
We report the theory and design equations of the suspended graphene varactor, wherein device capacitance is tuned by the voltage controlled deflection of a suspended graphene membrane. A simple model based on large membrane deflection predicts a capacitor tuning range of 76%, with a membrane pull-in voltage tuneable from 1V to 30V. An intrinsic electric quality factor approaching 200 is predicted based on experimentally determined Young's modulus and sheet resistance. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4757991]