▎ 摘　　要

The scheme of graphene on a silicon substrate is potentially compatible to the microelectronic technology. But the maintained plasmons have considerable ohmic loss because of silicon's large permittivity. We introduce air grooves in the silicon surface to reduce the optical thickness of substrate and hence decrease the propagation loss. The properties of graphene plasmons on the corrugated substrates are numerically investigated, in terms of the photon frequency and the geometrical parameters of the corrugated layer, considering both ohmic loss and scattering loss. The plasmons propagation lengths for the corrugated substrates can exceed twice of those for flat silicon in a broadband in mid-infrared. This study may be useful for designing of compact mid-infrared waveguides based on graphene for future photonic integrated circuits. (C) 2014 Optical Society of America