▎ 摘　　要

Regarding the dependence of the treatment of removing polymethyl methacrylate (PMMA) from graphene upon the prestress in the film, two typical PMMA removal methods including acetone-vaporing and high-temperature annealing were investigated based on the opto-mechanical behaviors of the developed optical fiber Fabry-Perot (F-P) resonant sensor with a 125-mu m diameter and similar to 10-layer-thickness graphene diaphragm. The measured resonant responses showed that the F-P sensor via annealing process exhibited the resonant frequency of 481 kHz and quality factor of 1 034 at similar to 2 Pa and room temperature, which are respectively 2.5 times and 33 times larger than the acetone-treated sensor. Moreover, the former achieved a high sensitivity of 110.4 kHz/kPa in the tested range of 2 Pa-2.5 kPa, apparently superior to the sensitivity of 16.2 kHz/kPa obtained in the latter. However, the time drift of resonant frequency also mostly tended to occur in the annealed sensor, thereby shedding light on the opto-mechanical characteristics of graphene-based F-P resonant sensors, along with an optimized optical excitation and detection scheme.