• 文献标题:   The evolution of surface cleanness and electronic properties of graphene field-effect transistors during mechanical cleaning with atomic force microscopy
  • 文献类型:   Article
  • 作  者:   PARK DH, CHO YJ, LEE JH, CHOI I, JHANG SH, CHUNG HJ
  • 作者关键词:   mobility, lateral force microscopy, mechanical cleaning, graphene
  • 出版物名称:   NANOTECHNOLOGY
  • ISSN:   0957-4484 EI 1361-6528
  • 通讯作者地址:   Konkuk Univ
  • 被引频次:   2
  • DOI:   10.1088/1361-6528/ab2cf6
  • 出版年:   2019

▎ 摘  要

The evolution of surface cleanliness and the electronic properties-Dirac voltage(V-D(irac)), hysteresis and mobility (mu) of a graphene field-effect transistor (GFET)-were monitored by measuring lateral force microscopy and drain current (I-D) as a function of gate voltage (V-G), after mechanically cleaning the surface, scan-by-scan, with contact-mode atomic force microscopy. Both the surface cleanliness and the electronic properties evolved, showing a sudden improvement and then saturation for a mobility of around 2200 cm(2) V-1 s(-1). We found that the mobility suppression of the as-fabricated GFET deviated from a randomly distributed impurities model, which predicted a greater mobility than obtained from the measured V-D(irac). Therefore, the substrate impurities are excluded from the origins of the extraordinary suppression of the mobility, and the possible origin will be discussed.