• 文献标题:   Low Partial Pressure Chemical Vapor Deposition of Graphene on Copper
  • 文献类型:   Article
  • 作  者:   SUN J, LINDVALL N, COLE MT, ANGEL KTT, WANG T, TEO KBK, CHUA DHC, LIU JH, YURGENS A
  • 作者关键词:   chemical vapor deposition, graphene, low partial pressure, nanoelectronic, wet transfer
  • 出版物名称:   IEEE TRANSACTIONS ON NANOTECHNOLOGY
  • ISSN:   1536-125X EI 1941-0085
  • 通讯作者地址:   Chalmers Univ Technol
  • 被引频次:   44
  • DOI:   10.1109/TNANO.2011.2160729
  • 出版年:   2012

▎ 摘  要

A systematic study of the Cu-catalyzed chemical vapor deposition of graphene under extremely low partial pressure is carried out. A carbon precursor supply of just P-CH4 similar to 0.009 mbar during the deposition favors the formation of large-area uniform monolayer graphene verified by Raman spectra. A diluted HNO3 solution is used to remove Cu before transferring graphene onto SiO2/Si substrates or carbon grids. The graphene can be made suspended over a similar to 12 mu m distance, indicating its good mechanical properties. Electron transport measurements show the graphene sheet resistance of similar to 0.6 k Omega/square at zero gate voltage. The mobilities of electrons and holes are similar to 1800 cm(2)/Vs at 4.2 K and similar to 1200 cm(2)/Vs at room temperature.