▎ 摘　　要

Here we present results on the influence of low-energy plasma irradiation of different duration and further annealing on highly oriented pyrolytical graphite (HOPG) layers. We used irradiation with a dose of intended to impact the upper 1 nm thick layer of the treated film. The influence of plasma was evaluated by the results of X-ray powder diffraction (XRD), Raman and X-ray photoelectron spectroscopy (XPS) studies. It was found that the treatment resulted in 20-30 % increasing of the intensity ratios of G and 2D Raman bands of HOPG layers. Moreover, the full width at a half maximum of the 2D band decreases from 80-90 to 55-60 . Further thermal annealing at for 7 min in air atmosphere additionally enhances the ratio in some cases. The XRD and XPS examinations show a significant thinning of the films and increasing of the content of -hybridized carbon. The content of C=O functional groups is increased instead of C-O groups during thermal annealing in air atmosphere.