▎ 摘 要
Diamond-like carbon (DLC) films embedded with crystalline graphite and multilayer graphene have been fabricated on silicon substrates by a simple electrochemical route from methanol and C-60-1, 2-ethylenediamine (C2H8N2) derivatives as an incorporating reagent at atmospheric pressure. The structure and sheet resistivity of the as-obtained films were characterized by x-ray photoelectron spectroscopy, Fourier-transform infrared (FTIR) spectroscopy, scanning electron microscopy, high-resolution transmission electron microscopy, and four-point probe measurements, respectively. The structure of the as-prepared films with crystalline graphite and multilayer graphene consisted of sp(2) C, sp(3) C, C-N, C-H, and N-H bonds. After introducing crystalline graphite and multilayer graphene, the conductivity of the DLC films was evidently improved and the sheet resistivity drastically decreased from 10(8) Omega cm to about 80 Omega cm.