• 文献标题:   Electrochemical Deposition of DLC Films Embedded with Crystalline Graphite and Multilayer Graphene
  • 文献类型:   Article
  • 作  者:   LIU GQ, WEI XL, QIANG L, ZHANG B, GAO KX
  • 作者关键词:   electrodeposition, dlc film, graphene, graphite
  • 出版物名称:   JOURNAL OF ELECTRONIC MATERIALS
  • ISSN:   0361-5235 EI 1543-186X
  • 通讯作者地址:  
  • 被引频次:   2
  • DOI:   10.1007/s11664-020-08703-9 EA JAN 2021
  • 出版年:   2021

▎ 摘  要

Diamond-like carbon (DLC) films embedded with crystalline graphite and multilayer graphene have been fabricated on silicon substrates by a simple electrochemical route from methanol and C-60-1, 2-ethylenediamine (C2H8N2) derivatives as an incorporating reagent at atmospheric pressure. The structure and sheet resistivity of the as-obtained films were characterized by x-ray photoelectron spectroscopy, Fourier-transform infrared (FTIR) spectroscopy, scanning electron microscopy, high-resolution transmission electron microscopy, and four-point probe measurements, respectively. The structure of the as-prepared films with crystalline graphite and multilayer graphene consisted of sp(2) C, sp(3) C, C-N, C-H, and N-H bonds. After introducing crystalline graphite and multilayer graphene, the conductivity of the DLC films was evidently improved and the sheet resistivity drastically decreased from 10(8) Omega cm to about 80 Omega cm.