• 文献标题:   Low-temperature deposition of multilayer graphene with continuous morphology and few defects
  • 文献类型:   Article, Proceedings Paper
  • 作  者:   GAO XL, ZHENG L, CHENG XH, XIN WB, YE PY, ZHANG DW
  • 作者关键词:  
  • 出版物名称:   JOURNAL OF MATERIALS SCIENCEMATERIALS IN ELECTRONICS
  • ISSN:   0957-4522 EI 1573-482X
  • 通讯作者地址:   Chinese Acad Sci
  • 被引频次:   0
  • DOI:   10.1007/s10854-019-02432-4
  • 出版年:   2020

▎ 摘  要

Multilayer graphene has increasingly attracted significant research interest owing to its high conductivity with an available band gap. Chemical vapor deposition (CVD) has shown a great promise for large-scale multilayer graphene growth with a high temperature (typically 1000 degrees C). Here, we adopt camphor as the hydrocarbon feedstock and nickel as the catalyst to grow multilayer graphene at a low temperature down to 550 degrees C. The transferred multilayer graphene shows a uniform and continuous surface morphology with a low surface roughness down to 0.6 nm and few defects. In addition, the low temperature CVD technique can be applied in the three-dimensional architecture of multilayer graphene. Our work may pave a way to an undemanding route for economical and convenient multilayer graphene growth and its applications in microelectronic devices.