▎ 摘　　要

Herein, multiwavelength Raman spectroscopy studies of graphene samples synthesized directly on SiO2 and Si(100) substrates by microwave plasma-enhanced chemical vapor deposition (MW PECVD), using five different excitation wavelengths in ultraviolet (UV), visible light, and near-infrared (NIR) ranges, are presented paying attention to the peculiarities of the spectra. Raman spectra parameters are analyzed to reveal effects of the excitation wavelength. Structural features of graphene directly synthesized on SiO2 and Si(100) are discussed. Analysis of the interdependences of various Raman spectra parameters reveals that the most informative spectra are recorded using 532 nm wavelength excitation. Examination of the full width at half maximum values of G band (FWHM(G)) reveals that the graphene layers synthesized on Si(100) substrate consist of smaller crystallites comparing with SiO2 substrate.