▎ 摘　　要

The effect of hot-filament on CVD growth of graphene was investigated using radiation-mode optical microscopy (Rad-OM), which we developed for the real-time observation of the CVD process of graphene. We found that the hot-filament induced nucleation and accelerated growth of graphene, the effects of which were enhanced by raising the filament temperature. At a certain filament temperature, growth was accelerated while no additive nucleation occurred. The present results suggest that decomposing source gas by hot-filament at optimized filament temperatures can accelerate growth while suppressing additive nucleation, which would be useful for synthesizing large-area single-crystalline graphene in a short time. (C) 2019 The Japan Society of Applied Physics