• 文献标题:   Mechanistic insights into supersaturation mediated large area growth of hexagonal boron nitride for graphene electronics
  • 文献类型:   Article
  • 作  者:   RAO A, RAGHAVAN S
  • 作者关键词:  
  • 出版物名称:   JOURNAL OF MATERIALS CHEMISTRY C
  • ISSN:   2050-7526 EI 2050-7534
  • 通讯作者地址:  
  • 被引频次:   1
  • DOI:   10.1039/d2tc01004f EA JUN 2022
  • 出版年:   2022

▎ 摘  要

Deposition of hexagonal boron nitride (h-BN) over large areas is an essential requirement for scaling electronic applications of 2D materials. Through an understanding of the physical chemistry of the popular ammonia-borane route, this work demonstrates control that can yield a range of deposits from isolated single crystal islands to polycrystalline monolayers with 15 micron islands to bulk multilayers. By constraining supersaturation both at the source and in the reactor, a five-orders-of-magnitude reduction in the unwanted nanocrystalline boron nitride (n-BN) density per mu m(2) has been achieved. Clean layers over 6 inch square areas and 4 inch wafer scale transfers prove scalability. The state-of-the-art mobility, 28 000 cm(2) v(-1) s(-1), achieved by graphene transistors synthesized on these h-BN layers is a proof of their having met the substrate requirements of 2D electronics.