• 文献标题:   Patterning of graphene using wet etching with hypochlorite and UV light
  • 文献类型:   Article
  • 作  者:   ZHANG MF, YANG M, OKIGAWA Y, YAMADA T, NAKAJIMA H, IIZUMI Y, OKAZAKI T
  • 作者关键词:  
  • 出版物名称:   SCIENTIFIC REPORTS
  • ISSN:   2045-2322
  • 通讯作者地址:  
  • 被引频次:   1
  • DOI:   10.1038/s41598-022-08674-3
  • 出版年:   2022

▎ 摘  要

Graphene patterning via etching is important for enhancing or controling the properties of devices and supporting their applications in micro- and nano-electronic fields. Herein, we present a simple, low-cost, and scalable wet etching method for graphene patterning. The technique uses hypochlorite solution combined with ultraviolet light irradiation to rapidly remove unwanted graphene areas from the substrate. Raman spectroscopy, atomic force microscopy, scanning electron microscopy, and optical microscopy results showed that well-patterned graphene with micrometer scale regions was successfully prepared. Furthermore, graphene field effect transistor arrays were fabricated, and the obtained devices exhibited good current-voltage characteristics, with maximum mobility of similar to 1600 cm(2)/Vs, confirming the feasibility of the developed technique.