▎ 摘　　要

The establishment of the roll-to-roll CVD is one of the key factors for realizing the commercial application of graphene. The strain in graphene synthesized by high-throughput plasma CVD using two different conditions related to growth rate and tension to the substrate is analyzed by scanning transmission electron microscopy (STEM) and Raman spectroscopy. The compressive strain generated during the growth by the tension to the substrate and the difference in thermal expansion coefficient between the graphene and the copper substrate is observed, which affects electrical conductivity. It was confirmed by STEM observation that no particularly large strain was accumulated at grain boundaries and their surroundings. (C) 2017 The Japan Society of Applied Physics.