• 文献标题:   Direct patterning of nitrogen-doped chemical vapor deposited graphene-based microstructures for charge carrier measurements employing femtosecond laser ablation
  • 文献类型:   Article
  • 作  者:   KOVALCHUK NG, NIHERYSH KA, FELSHARUK AV, SVITO IA, TAMULEVICIUS T, TAMULEVICIUS S, KARGIN NI, KOMISSAROV IV, PRISCHEPA SL
  • 作者关键词:   nitrogen doped graphene, femtosecond laser ablation, hall resistance, charge carrier concentration
  • 出版物名称:   JOURNAL OF PHYSICS DAPPLIED PHYSICS
  • ISSN:   0022-3727 EI 1361-6463
  • 通讯作者地址:   Kaunas Univ Technol
  • 被引频次:   1
  • DOI:   10.1088/1361-6463/ab1c4b
  • 出版年:   2019

▎ 摘  要

Chemical vapor deposited nitrogen-doped graphene, transferred onto a SiO2/Si substrate, was selectively patterned by femtosecond laser ablation for the formation of the topology dedicated to charge carrier measurements. Ultrashort 1030nm wavelength Yb:KGW fs-laser pulses of 22 mu J energy,14 mJ cm(-2) fluence, 96% pulse overlap, and a scanning speed of 100mm s(-1), were found to be the optimum regime for the high throughput microstructure ablation in graphene, without surface damage of the substrate in the employed fs-laser micromachining workstation. Optical scanning electron and atomic force microscopy, as well as Raman spectroscopy, were applied to clarify the intensive fs-laser light irradiation effects on graphene and the substrate, and to also verify the quality of the graphene removal. Measurements of magnetotransport properties of the fs-laser ablated nitrogen-doped graphene microstructure in the Hall configuration enabled the determination of the type, as well as concentration of charge carriers in a wide range of temperatures.