▎ 摘　　要

Planar on-chip micro-supercapacitors are recognized as one of the most competitive energy sources for electronics. Here, we showed ultrahigh performance all-solid-state planar on-chip micro-supercapacitors with photolithographic interdigital electrodes based on modified liquid-air interface self-assembly technique. The electrode width which is narrower than other existing lithography is only on the order of 10 degrees mu m (electrode width is 4 mu m and the gap width is 4 mu m). Planar on-chip micro-supercapacitors prepared with reduced graphene oxide films as electrodes had the energy density of 124.4 mWh cm(-3), the corresponding time constant of 2.15 mu s and the displayed stack capacitance of 895.74 F cm(-3). In addition, it exhibited excellent cycle stability with a capacitance retention of 98.9% after 10,000 cycles. The demonstrated planar on-chip micro-supercapacitors have a good application foreground in the preparation of high-performance integrated micro-devices.