▎ 摘 要
A Fabry-Perot acoustic sensor based on a graphene oxide membrane was developed with the aim to achieve a faster and simpler fabrication procedure when compared to similar graphene-based acoustic sensors. In addition, the proposed sensor was fabricated using methods that reduce chemical hazards and environmental impacts. The developed sensor, with an optical cavity of around 246 mu m, showed a constant reflected signal amplitude of 6.8 +/- 0.1 dB for 100 nm wavelength range. The sensor attained a wideband operation range between 20 and 100 kHz, with a maximum signal-to-noise ratio (SNR) of 32.7 dB at 25 kHz. The stability and sensitivity to temperatures up to 90 degrees C was also studied. Moreover, the proposed sensor offers the possibility to be applied as a wideband microphone or to be applied in more complex systems for structural analysis or imaging.