• 文献标题:   Investigation of Sensing Characteristic of Flexible Arrayed RuO2 Chlorine Ion Sensor Modified by Graphene Oxide
  • 文献类型:   Article
  • 作  者:   TSENG SC, WU TY, CHOU JC, LIAO YH, LAI CH, YAN SJ, TSENG TW
  • 作者关键词:   ruthenium dioxide, graphene oxide, response time, interference effect, hysteresis effect drift effect
  • 出版物名称:   IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
  • ISSN:   0894-6507 EI 1558-2345
  • 通讯作者地址:   Natl Yunlin Univ Sci Technol
  • 被引频次:   1
  • DOI:   10.1109/TSM.2018.2802486
  • 出版年:   2018

▎ 摘  要

In this paper, the response time, interfering effect, drift effect, and hysteresis effect were investigated for the flexible arrayed ruthenium dioxide (RuO2)/0.01 wt% graphene oxide (GO) chlorine ion sensor. The best response time was 2 s in 10(-2) M and 1 M NaCl solutions. The KNO3, CaSO4, CaCO3, K2SO4, NaHCO3, and NaI solutions were dropped in 10(-5) M NaCl solution for interference measurement. The experimental results proved that the flexible arrayed RuO2/0.01 wt% GO chlorine ion sensor has good selectivity. The hysteresis potentials of the flexible arrayed RuO2/0.01 wt% GO chlorine ion sensor were 1.548 mV and 1.138 mV in the NaCl solutions during the cycles of 1 M -> 10(-1) M -> 1 M -> 10(-3) M -> 1 M and 1 M -> 10(-3) M -> 1 M -> 10(-1) M -> 1 M, respectively. The drift rate of the flexible arrayed RuO2/0.01 wt% GO chlorine ion sensor was 0.186 mV/hr in 10(-2) M NaCl solution. According the experiment result, the GO was used to modify the RuO2 sensing membrane, and the 0.01 wt% GO increased the sensing film conductivity and could reduce the response time, hysteresis effect and drift effect.