▎ 摘　　要

In this work, the optical response of the gold nanoparticles is used for low-damage nitridation of graphene over a graphite substrate. Nitrogen-doped graphene with high two-dimensional crystallinity is successfully formed via radicals and light from a low-temperature, low-pressure, inductively coupled argon-diluted ammonia plasma. The graphene over a graphite substrate is covered with gold nanoparticles with an average diameter of 6.2nm and irradiated with light and NHx radicals produced by the plasma. The use of an ion shield to prevent ion bombardment enabled a high quaternary N site density with significant Raman 2D signal. The intensity ratio of 2D to G reaches seven in some samples. Nitrogen doping with low damage to the graphene lattice is promoted by hot-electron injection from photoexcited gold nanoparticle plasmons into the adsorbed state of NHx radicals. With the addition of ion bombardment, a high pyridinic N density is achieved, along with the production of a graphene edge. The optical response of the gold nanoparticles provides supporting evidence for the preferential nitridation of the graphene edge. It can be inferred that hot electrons supplied by surface plasmon resonance, which is unique to the gold nanoparticles, or photoemission by ultraviolet rays promote the reaction between NHx radicals and the substrate surface.