▎ 摘　　要

Graphene-based metamaterials have been widely applied in optoelectronic devices, optical modulators, and chemical sensors due to the outstanding tunability and optical response in the terahertz (THz) region. Here, tunable THz metamaterial absorbers based on patterned graphene are designed, fabricated, and modulated. The proposed metamaterial absorbers are constructed by the top layer of patterned graphene arrays and the aluminum (Al) film separated by polyimide (PI). The different THz absorption spectra can be acquired by changing the patterns of graphene. In order to verify the simulation results, a series of tests were conducted by THz time-domain spectrometer (THz-TDS) systems. The proposed absorbers are able to be insensitive to the angle of the incident wave. Besides, chemical doping is applied to turn the Fermi level of graphene and the absorption performance is promoted with the increase of the Fermi level. The experimental results have been demonstrated to have associated resonant peaks with the simulation results. The aim of this paper is to exhibit a systematic study on graphene-based THz metamaterial absorbers, including the simulation and experiments. By comparing the simulation and experimental results, it is useful to clarify the relevant theories and manufacturing processes. The work will provide a further step in the development of high-performance terahertz devices, including tunable absorbers, sensors, and electro-optic switches.