• 文献标题:   Electron field emission from graphene nanosheets grown on Si nanoporous pillar array
  • 文献类型:   Article
  • 作  者:   TANG ZJ, LI S, ZHU Z, LI XJ
  • 作者关键词:   graphene nanosheet, si nanoporous pillar array, field emission, flat lying
  • 出版物名称:   MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
  • ISSN:   1369-8001 EI 1873-4081
  • 通讯作者地址:   Zhengzhou Univ
  • 被引频次:   1
  • DOI:   10.1016/j.mssp.2018.09.006
  • 出版年:   2019

▎ 摘  要

Graphene nanosheet (GNS) thin film was grown flat lying on Si nanoporous pillar array (Si-NPA) substrate using Ni nanocrystallites as catalyst by a chemical vapor deposition method, and its field electron emission characteristics were studied. The thin film was proved to be composed of high-quality few-layer GNSs with a typical size of similar to 6 nm. With a turn-on field of similar to 2.85 V/mu m, an emission current density of similar to 53.9 mu A/cm(2) was obtained at an electric field of 4.2 V/mu m. Based on the experimental data, the enhancement factor of few-layer GNS/SiNPA was calculated to be similar to 2700 according to the Fowler-Nordheim theory. The cold cathode also showed higher emission stability than vertically standing graphene at low operating voltages. For comparison, GNS/SiNPA with multi-layer GNSs was prepared and its turn-on field was obtained as high as 8.5 V/mu m. The origin of the high emission performance was attributed to numerous emission sites formed at the edges of GNSs, unique structure and morphology of GNS/Si-NPA, and low electric resistance of GNSs. Our results might have provided an alternative approach for fabricating Si-based low-voltage cold cathodes with high device performances.