▎ 摘　　要

A multilayer optical system containing poly-Si film, SiO2 film, and Si substrate (poly-Si substrate) has been designed to enhance the visibility of graphene in contact with poly-Si. Film thicknesses of poly-Si and SiO2 have been optimized by parametric study of the integral contrast of single layer graphene using transfer matrix theory. The multilayer poly-Si substrate and the most commonly used 285 nm SiO2/Si substrate (SiO2 substrate) have been fabricated. Graphene grown by chemical vapor deposition on Ni catalyst has been transferred to the substrates and the visibility of the graphene on the different substrates has been compared. The samples have been characterized by optical microscope, illuminated with light from halogen lamp, and/or filtered with a 600 nm narrow band optical filter. The contrast of graphene on poly-Si substrate has been increased to near 8.7% under 600 nm narrow band illumination from nearly invisible under ordinary illumination, while the contrast of graphene on SiO2 remains almost the same. Raman spectroscopy has been used to verify the presence of the single layer graphene on the poly-Si substrate. (C) 2012 American Vacuum Society. [http://dx.doi.org/10.1116/1.4758760]