• 文献标题:   Mask less laser processing of graphene
  • 文献类型:   Article, Proceedings Paper
  • 作  者:   WAKAYA F, KURIHARA T, YURUGI N, ABO S, ABE M, TAKAI M
  • 作者关键词:   graphene, mask less laser proces, ultraviolet laser
  • 出版物名称:   MICROELECTRONIC ENGINEERING
  • ISSN:   0167-9317 EI 1873-5568
  • 通讯作者地址:   Osaka Univ
  • 被引频次:   7
  • DOI:   10.1016/j.mee.2015.03.049
  • 出版年:   2015

▎ 摘  要

Graphene on a SiO2/Si substrate was removed by ultraviolet pulsed laser irradiation. Threshold laser power density to remove graphene depended on the graphene thickness. The mechanism is discussed using kinetic energy of thermal expansion of the substrate surface. Utilizing the thickness dependence, thickness (or layer-number) selective process for graphene is demonstrated. Maskless patterning of graphene using laser irradiation in the air is also demonstrated. (C) 2015 Elsevier B.V. All rights reserved.