• 文献标题:   Highly sensitive and flexible pressure sensors using position- and dimension-controlled ZnO nanotube arrays grown on graphene films
  • 文献类型:   Article
  • 作  者:   PARK JB, SONG MS, GHOSH R, SAROJ RK, HWANG Y, TCHOE Y, OH H, BAEK H, LIM Y, KIM B, KIM SW, YI GC
  • 作者关键词:  
  • 出版物名称:   NPG ASIA MATERIALS
  • ISSN:   1884-4049 EI 1884-4057
  • 通讯作者地址:  
  • 被引频次:   12
  • DOI:   10.1038/s41427-021-00324-w
  • 出版年:   2021

▎ 摘  要

A facile and novel technique for the fabrication of pressure sensors is reported based on the hybridization of one-dimensional nanomaterials and two-dimensional graphene film. In particular, piezoelectric pressure sensors are fabricated by using vertically aligned and position- and dimension-controlled ZnO nanotube arrays grown on graphene layers. Graphene layers act not only as substrates for catalyst-free growth of high-quality ZnO nanotubes but also as flexible conduction channels connecting ZnO nanotubes and metal electrodes. Freestanding and flexible sensors have been efficiently obtained via mechanical lift-off of hybrid ZnO nanotube/graphene film structures and by exploiting the weak van der Waals forces existing between the graphene film and the original substrates. A prototype of such devices shows a high pressure sensitivity (-4.4 kPa(-1)), which would enable the detection of weak flows of inert gas. The relatively low wall thickness and large length of the ZnO nanotubes suggest a relatively high sensitivity to external pressures. The obtained nanotube sensors are attached to the philtrum and wrist of a volunteer and used to monitor his breath and heart rate. Overall, the prototype hybrid sensing device has great potential as wearable technology, especially in the sector of advanced healthcare devices.